Sustainability Report 2021 70 Chemical Impact Metric Modeling Sustainability and Efficiency Designed in-house, our web-based modeling tool analyzes design and end-user data to pinpoint sustainability improvements for legacy, in-production, and design- stage semiconductor manufacturing tools. Modeling efforts support our 3x30 goals of reducing energy use, chemical consumption, and the equipment’s physical footprint to increase throughput density per square foot of cleanroom space. By modeling tools early in the design process, our product design engineers gain the data they need to reduce a tool’s projected resource consumption and other environmental impacts before the tool goes into production. Analysis of existing tools supports identification of process efficiency improvements that we can communicate to our customers to boost sustainability performance in their fabs. In 2021, we completed an effort to set energy consumption baselines (2019 basis) for our complete line of SPG semiconductor products, a process that will help drive further improvement and also inform calculation of our Scope 3 emissions in Category 11 (use of sold products). In addition, we completed our first-in- the-industry chemical impact analysis and began leveraging the results to improve tool and process design, including efforts to reduce, eliminate, and/or replace the most negatively impactful chemicals used by our tools. Baselining our chemical impacts in GHG equivalents also contributes to our Scope 3 assessments. UPSTREAM IMPACTS POST- ABATEMENT EMISSIONS CRADLE - TO - GATE GATE - TO - GATE DIRECT PROCESS DRAINS (IF PRESENT) ABATEMENT DRAINS DRAIN IMPACTS By-product Chemicals Abatement Process Chamber Chemical Production & Transportation Sustainability Report 2021 70 Sustainability Report 2021 70 INTRODUCTION PURPOSE PEOPLE PLANET PROGRESS Design for Sustainability Promoting the Circular Economy Product Safety Supply Chain Responsibility